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freepatentsonline.com: Coating apparatus


Multiple orifice applicator with improved sealing
A multiple orifice applicator system for dispensing a plurality of rows of fluid material onto a work piece is disclosed. A source of fluid material is in fluid communication with the multiple orifice applicator. The multiple orifice applicator is mounted to a robotic arm, which positions the multiple orifice applicator relative to the work piece to enable the multiple orifice applicator to dispense fluid material onto the work piece. Fluid material is caused to flow from the source of fluid material into the multiple orifice applicator. The fluid material enters the multiple orifice applicator through an inlet duct and is dispersed and spread out into at least one dispersing chamber. The fluid material is dispensed onto the work piece through a plurality of outlet orifices in the multiple orifice applicator.

Coating apparatus and coating method using the same
To provide a coating apparatus, which can surely prevent a coating solution from spreading, to simplify a manufacturing process and reduce the manufacturing cost and provide a coating method using the same. The coating apparatus includes a holding table holding a plate having a through hole penetrating in a thickness direction; and a coating head including a slit-shaped nozzle orifice which discharges a coating solution, the nozzle orifice being opposed to a coating surface opposite to a holding surface held on the holding table. The coating apparatus applies the coating solution to the coating surface of the plate by moving the plate and the coating head relative to each other in an in-plane direction of the coating surface. In addition, the coating apparatus includes coating preventing means, which prevents the coating solution from entering the through hole of the plate.

Monitoring and controlling of laser operation
A laser monitoring and controlling apparatus is disclosed that includes a laser, a data server and a laser Graphical User Interface (GUI). In an embodiment, the apparatus further includes, an imaging means and means for displaying images from the imaging means on the GUI.

Precursor mixtures for use in preparing layers on substrates
Methods of forming a layer on a substrate using complexes of Formula I. The complexes and methods are particularly suitable for the preparation of semiconductor structures. The complexes are of the formula L y MY z (Formula I) wherein: M is a metal; each L group is independently a neutral ligand containing one or more Lewis-base donor atoms; each Y group is independently an anionic ligand; y=a nonzero integer; and z=a nonzero integer corresponding to the valence state of the metal.

Plasma processing apparatus and method thereof
A nozzle head NH of a plasma processing apparatus comprises an annular inner holder 3 , an annular inner electrode 11 surrounding this holder 3 , an annular outer electrode 21 surrounding this electrode 11 , and an annular outer holder 4 surrounding this electrode 21 . The inner holder 3 is provided with a plurality of bolts 7 spacedly arranged in the peripheral direction and adapted to push the inner electrode 11 radially outwardly. The outer holder 4 is provided with a plurality of bolts 8 spacedly arranged in the peripheral direction and adapted to push the outer electrode 21 radially inwardly. Owing to this arrangement, the operation for disassembling, assembling and centering the annular electrodes 11, 21 can be carried out with ease.

Plasma processing method and apparatus
A plasma processing method includes exhausting the interior of a vacuum chamber while supplying gas into the vacuum chamber while maintaining the interior of the vacuum chamber at a desired pressure. A high-frequency power of 100 kHz to 100 MHz is applied to a coil provided in the vicinity of a dielectric window which faces a substrate placed on a substrate electrode in the vacuum. Plasma is generated in the vacuum chamber to process the substrate or a film on the substrate. Particles which tend to move straight from a surface of the substrate or from a surface of the film on the substrate toward a wall surface of the dielectric window inside the vacuum chamber are kept interrupted by a metal plate.

Thermally sprayed member, electrode and plasma processing apparatus using the electrode
A thermally sprayed member or an electrode includes a basic material, a thermally sprayed film formed on the surface of the basic material, the thermally sprayed film being made of an insulating ceramic and a metallic intermediate layer provided between the basic material and the thermally sprayed film for increasing a bonding force therebetween, wherein the thermally sprayed film side of the member is exposed to a high frequency plasma atmosphere and the electrode is intended to form a high frequency plasma on the side of the thermally sprayed film. The basic material includes a base portion made of a conductive material and a dielectric portion provided to include a part of a surface of the basic material. Further, the intermediate layer is comprised of a plurality of island-shaped parts isolated from each other.

Thermal projection device
The invention relates to a device and a method for control of the operation of a thermal projection torch ( 12 ), characterized in that the characteristics of the jet ( 16 ) and the temperature of the deposit ( 24 ) on the piece ( 22 ) are measured by means of a camera ( 54 ) and a combined pyrometer ( 70 ). The correction to be made to the supply parameters of the torch ( 12 ) are deduced therefrom and the corrected parameters are transmitted to the unit ( 30 ) controlling the torch ( 12 ).

Doctor bed
A doctor bed is provided for holding a circularly cylindrical metering rod, including a housing of a homogenous material, which is designed with a cross section at right angles to the cylinder longitudinal axis of the metering rod and has a circularly cylindrical recess which surrounds the metering rod with a form fit over at least 180°. The doctor bed is arranged on a machine processing a moving material web, there being arranged on the housing, in the region of the recess, at least one groove running parallel to the cylinder longitudinal axis of the metering rod. A wiping strip is arranged detachably between the metering rod and the doctor bed.

Plating apparatus and plating method
There is provided a plating apparatus and method which can control the temperature of a plating solution during plating more uniformly and easily form a uniform plated film on the to-be-plated surface of a workpiece, and which can simplify the device and decrease the footprint. The plating apparatus includes a plating bath having a double bath structure including an inner bath for holding a plating solution and carrying out plating, and an outer bath which surrounds the inner bath and is in fluid communication therewith. A heating device is disposed in the outer bath. The plating apparatus may further include means for circulating or stirring the plating solution in the plating bath.