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Quadrupole mass spectrometer and vacuum device using the same
In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.
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| Quadrupole+mass+spectrometer+and+vacuum+device+using+the+same |
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Atmospheric pressure ion source high pass ion filter
For generation and delivery of ions from an ionization chamber through an ion entrance orifice to a mass analyzer operating at high vacuum, high pass ion filtration is effected within the ionization chamber by application of electrical potentials to an electrode associated with the ion entrance orifice and to an electrode between the ionization region and the ion entrance orifice to create a retarding electric field upstream from the ion entrance orifice. The retarding electric field hinders the movement to the ion entrance orifice of ions having drift velocities below a lower limit, and as the retarding voltage gradient is made steeper, the lower limit increases.
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| Atmospheric+pressure+ion+source+high+pass+ion+filter |
Plasma panel based ionizing radiation detector
A radiation detector is formed from a plasma panel that includes a front substrate, and a back substrate that forms a generally parallel gap with the front substrate. X (column) and Y (row) electrodes are coupled by gas discharge events to define one or more pixels. Impedances are coupled to the X and Y electrodes, and a power supply is coupled to one or both types of electrodes. Discharge event detectors are coupled to the impedances.
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| Plasma+panel+based+ionizing+radiation+detector |
Gas sensor arrangement with improved long term stability and measuring method
The present invention relates to a gas sensor arrangement comprising at least one radiation source emitting radiation, a gas measuring chamber which may be filled with a gaseous analyte containing at least one analyte to be measured, and comprising at least one detector device which detects the radiation and generates an output signal indicating the presence and/or the concentration of the analyte. In order to provide an improved gas sensor arrangement of the type mentioned at the outset which ensures, in a particularly simple manner, long-term stable operation of the arrangement even over long periods of time, the control device comprises a power detection unit which may be operated to measure the electrical output consumed by the at least one radiation source.
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| Gas+sensor+arrangement+with+improved+long+term+stability+and+measuring+method |
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Cold shield for cryogenic camera
A cold shield of a cryogenic camera. The cold shield reflects external thermal radiation away from the cryogenic camera, so as to shield the cryogenic camera in a cryogenic temperature such that no internal thermal radiation will be generated. The cryogenic camera has a lens assembly and a focal plane array. The cold shield has an upper cold shield member for holding the lens assembly and a lower cold shield member for holding the focal plane array. The upper cold shield member fits over the lower cold shield member by contact friction, such that limited translation and rotation of the lower cold shield member relative to the upper cold shield member are allowable. Therefore, the cold shield allows a fine adjustment for aligning the lens assembly to the focal plane array.
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| Cold+shield+for+cryogenic+camera |
Device and method for imaging a multiple particle beam on a substrate
A device and a method for imaging and positioning a multiparticle beam on a substrate is disclosed. The device comprises a particle beam source with a condenser optic that produces a particle beam that illuminates the surface of an aperture plate. A multiplicity of individual beams are produced from the particle beam by means of the aperture plate, which are then projected by a projection system onto a substrate where they describe a beam base point. The substrate or target, respectively, is placed on a table that is movable along an x-coordinate and a y-coordinate, and that is provided with a laser path measurement system. The laser path measurement system relays positional data with a fixed clock rate to a synchronization and control device 50 that positions the beam base point along the x-coordinate and the y-coordinate via a beam tracking system, taking into account the corrective data and pixel phase, whereby precise staircase beam-to-table positioning is achieved across the entire substrate in spite of faulty table movement.
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| Device+and+method+for+imaging+a+multiple+particle+beam+on+a+substrate |
Variable gain imaging
An apparatus may include a scintillator to emit light, imaging elements to capture image information based on received light, and an optical filter disposed between the scintillator and the imaging elements, wherein an opacity of the optical filter is controllable.
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| Variable+gain+imaging |
IR camera
An IR camera for recording and presenting a thermal image of an object includes optical receiving elements for focusing infra-red radiation received from the object onto a focal plane array and processing elements for receiving and processing the data from the focal plane array to form a thermal image, presentation elements for presenting the thermal image and storage elements for storing the thermal image. The IR camera further includes receiving elements for receiving from at least one humidity sensor arranged to provide humidity information, information about the humidity in a least one measuring point on the object, and forwarding the humidity information to the processing elements, the processing elements the processing elements being arranged to include the humidity information in the thermal image. In this way the camera can directly identify any points on the object where there is risk for damp.
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| IR+camera |
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